ZYGO ZMI-4004 測量板 PDF資料
1.產 品 資 料 介 紹：
中文資料：
ZYGO ZMI-4004 是一款高精度測量板，主要用于干涉測量系統中，以實現納米級的位移測量和精確定位。ZYGO 公司專注于超精密測量和光學干涉技術，其 ZMI 系列產品廣泛應用于半導體制造、光學加工、計量和高精度運動控制等領域。
ZYGO ZMI-4004 測量板特點
高精度測量
- 采用激光干涉測量技術，可實現納米級甚至更高分辨率的位移測量。
- 適用于高精度定位和運動控制應用。
多通道支持
- ZMI-4004 可能支持多個干涉測量通道，適用于復雜的多軸測量系統。
實時信號處理
- 具備高性能信號處理功能，可提供快速、準確的測量反饋。
兼容性
- 兼容 ZYGO 的激光干涉儀系統，如 ZMI 系列干涉儀和光學測量系統。
應用場景廣泛
- 半導體制造（晶圓對準、光刻機精密運動控制）
- 精密機械加工（納米級定位）
- 科研實驗（高分辨率位移測量）
- 航空航天精密測量系統
英文資料：
ZYGO ZMI-4004 is a high-precision measurement board mainly used in interferometric measurement systems to achieve nanoscale displacement measurement and precise positioning. ZYGO company focuses on ultra precision measurement and optical interference technology, and its ZMI series products are widely used in fields such as semiconductor manufacturing, optical processing, metrology, and high-precision motion control.
Characteristics of ZYGO ZMI-4004 measuring board
high precision measurement
By using laser interferometry measurement technology, displacement measurement at the nanometer level or even higher resolution can be achieved.
Suitable for high-precision positioning and motion control applications.
Multi channel support
ZMI-4004 may support multiple interferometric measurement channels and is suitable for complex multi axis measurement systems.
Real-time signal processing
Equipped with high-performance signal processing capabilities, it can provide fast and accurate measurement feedback.
compatibility
Compatible with ZYGO laser interferometer systems, such as ZMI series interferometers and optical measurement systems.
Widely applicable scenarios
Semiconductor manufacturing (wafer alignment, precision motion control of lithography machines)
Precision machining (nanometer level positioning)
Scientific research experiment (high-resolution displacement measurement)
Aerospace Precision Measurement System
2.產 品 展 示
3.其他產品
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本篇文章出自瑞昌明盛自動化設備有限公司官網，轉載請附上此鏈接:http://www.jiangxidcs
