MKS 979B-01-0013 真空傳感器 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
MKS 979B-01-0013 是一款高精度的真空壓力傳感器，屬于 MKS Instruments 的 Baratron? 系列，廣泛應(yīng)用于半導(dǎo)體制造、真空系統(tǒng)控制和精密氣體測量領(lǐng)域。
主要技術(shù)參數(shù)
- 測量范圍： 0-100 托
- 精度： 0.05%
- 長期穩(wěn)定性： 0.01%/年
- 重復(fù)性： 0.02%
- 響應(yīng)時間： <1 毫秒
- 輸出信號： 0-5V
- 供電電壓： 24V DC
應(yīng)用領(lǐng)域
- 半導(dǎo)體制造： 適用于蝕刻、沉積、離子注入等精密工藝
- 薄膜沉積： 可用于 PVD、CVD、ALD 工藝
- 真空鍍膜： 應(yīng)用于光學(xué)鍍膜、金屬鍍膜等行業(yè)
- 氣體分析： 適用于色譜、質(zhì)譜和紅外光譜等精密儀器
- 科研實驗： 物理、化學(xué)、材料科學(xué)等領(lǐng)域的實驗室真空測量
該傳感器采用電容式壓力測量技術(shù)，能夠在高真空環(huán)境下提供極高的穩(wěn)定性和精確度，是許多高端工業(yè)和科研應(yīng)用的理想選擇。
英文資料：
MKS 979B-01-0013 is a high-precision vacuum pressure sensor belonging to MKS Instruments' Baratron ? Series, widely used in semiconductor manufacturing, vacuum system control, and precision gas measurement fields.
Main technical parameters
Measurement range: 0-100 pallets
Accuracy: 0.05%
Long term stability: 0.01%/year
Repeatability: 0.02%
Response time:<1 millisecond
Output signal: 0-5V
Supply voltage: 24V DC
application area
Semiconductor manufacturing: suitable for precision processes such as etching, deposition, ion implantation, etc
Thin film deposition: can be used for PVD, CVD, ALD processes
Vacuum coating: applied in industries such as optical coating and metal coating
Gas analysis: suitable for precision instruments such as chromatography, mass spectrometry, and infrared spectroscopy
Research experiments: Laboratory vacuum measurement in fields such as physics, chemistry, materials science, etc
This sensor adopts capacitive pressure measurement technology, which can provide extremely high stability and accuracy in high vacuum environments, making it an ideal choice for many high-end industrial and scientific research applications.
2.產(chǎn) 品 展 示
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