LAM 332-000474-000光學擴展器模塊 PDF資料
1.產 品 資 料 介 紹:
中文資料:
LAM 332-000474-000 光學擴展器模塊 是泛林半導體(LAM Research)設備中一種關鍵的光學組件,通常用于光學信號處理或擴展相關功能。這類模塊廣泛應用于半導體加工設備中,例如用于監(jiān)控、測量和控制制造過程中涉及的光學信號,如光刻、蝕刻、或沉積工藝。
產品特點
高精度光學性能:
- 設計用于高分辨率光學信號擴展或調節(jié),能夠精準處理多種波長的光信號。
- 支持復雜工藝下的光學監(jiān)測或校準功能。
模塊化集成:
- 緊湊型設計,易于集成到半導體制造設備的光學子系統(tǒng)中。
- 可與其他光學模塊和控制系統(tǒng)無縫協(xié)作。
耐用性和可靠性:
- 采用高質量材料制造,耐受惡劣工藝環(huán)境(如高溫、化學腐蝕氣氛)。
- 優(yōu)化的散熱和抗干擾設計,確保模塊的長期穩(wěn)定運行。
可定制化:
- 支持特定應用的光學需求定制,例如特定波長范圍或擴展倍率。
- 靈活的接口設計,可根據系統(tǒng)需求調整信號輸入/輸出格式。
應用靈活性:
- 模塊可用于光學信號傳輸、功率調節(jié)、信號放大或其他相關功能。
技術規(guī)格(假設參考)
參數 | 描述 |
---|---|
波長范圍 | 400 nm - 1100 nm(或按設備需求定制) |
擴展倍率 | 可選倍率,如 1x、2x、5x |
光損耗 | < 0.5 dB(典型值) |
接口類型 | 光纖接口或自由空間耦合 |
工作溫度范圍 | 0°C 至 70°C |
外殼材料 | 鋁合金或其他抗腐蝕材料 |
尺寸 | 定制設計,適應設備集成需求 |
英文資料:
The LAM 332-000474-000 optical extender module is a critical optical component in LAM Research equipment, typically used for optical signal processing or expanding related functions. This type of module is widely used in semiconductor processing equipment, such as for monitoring, measuring, and controlling optical signals involved in manufacturing processes, such as photolithography, etching, or deposition processes.
Product Features
High precision optical performance:
Designed for high-resolution optical signal extension or adjustment, capable of accurately processing optical signals of multiple wavelengths.
Support optical monitoring or calibration functions under complex processes.
Modular integration:
Compact design, easy to integrate into optical subsystems of semiconductor manufacturing equipment.
It can seamlessly collaborate with other optical modules and control systems.
Durability and reliability:
Made with high-quality materials, it can withstand harsh process environments such as high temperatures and chemical corrosive atmospheres.
Optimized heat dissipation and anti-interference design ensure the long-term stable operation of the module.
Customizable:
Support customization of optical requirements for specific applications, such as specific wavelength ranges or expansion rates.
Flexible interface design allows for the adjustment of signal input/output formats according to system requirements.
Application flexibility:
The module can be used for optical signal transmission, power regulation, signal amplification, or other related functions.
Technical specifications (assuming reference)
Parameter description
Wavelength range 400 nm -1100 nm (or customized according to device requirements)
Expansion magnification options, such as 1x, 2x, 5x
Optical loss<0.5 dB (typical value)
Interface type: fiber optic interface or free space coupling
Working temperature range: 0 ° C to 70 ° C
Shell material: aluminum alloy or other corrosion-resistant materials
Customized size design to meet equipment integration requirements
2.產 品 展 示
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