LAM 710-073479-005氣體盒主板 PDF資料
1.產 品 資 料 介 紹：
中文資料：
LAM 710-073479-005 是一款氣體盒主板，通常用于半導體制造設備中，負責控制和管理氣體供應系統。它在高精度的環境中確保氣體流量和壓力的穩定性，支持設備的正常運行。
主要特點：
- 氣體控制：用于監控和調節氣體供應系統的工作狀態，確保設備在精準氣體條件下運行。
- 高精度調節：支持高精度的氣體流量和壓力控制，適應半導體制造中對氣體環境的嚴格要求。
- 耐用性：設計上具有較強的抗干擾能力和耐用性，能夠適應高溫、震動等工業環境。
- 集成接口：具備與其他設備和傳感器的接口，方便與其他系統進行集成和數據傳輸。
應用領域：
- 半導體制造：用于光刻機、薄膜沉積設備等氣體供應系統，確保氣體精確控制。
- 工業自動化：在自動化生產線中用于氣體調節和控制，支持高效的生產過程。
- 精密儀器：在激光系統、物理實驗等精密設備中應用，確保氣體環境的穩定。
維護與使用：
- 定期檢查：定期檢查氣體供應系統的狀態和氣體盒主板的連接，確保其正常工作。
- 氣體兼容性：確保使用的氣體與系統兼容，避免損壞設備。
- 清潔和校準：定期清潔和校準主板，確保氣體控制精度和系統穩定。
該氣體盒主板確保半導體設備中氣體供應系統的穩定性和高精度調節，是保證高精度生產過程的重要組成部分。
英文資料：
LAM 710-073479-005 is a gas box motherboard commonly used in semiconductor manufacturing equipment to control and manage gas supply systems. It ensures the stability of gas flow and pressure in a high-precision environment, supporting the normal operation of equipment.
Main features:
Gas control: used to monitor and regulate the working status of gas supply systems, ensuring that equipment operates under precise gas conditions.
High precision regulation: supports high-precision gas flow and pressure control, adapting to the strict requirements of gas environment in semiconductor manufacturing.
Durability: Designed with strong anti-interference ability and durability, it can adapt to industrial environments such as high temperature and vibration.
Integrated interface: It has interfaces with other devices and sensors, facilitating integration and data transmission with other systems.
Application areas:
Semiconductor manufacturing: used in gas supply systems such as lithography machines and thin film deposition equipment to ensure precise gas control.
Industrial automation: Used for gas regulation and control in automated production lines, supporting efficient production processes.
Precision instruments: applied in precision equipment such as laser systems and physics experiments to ensure stable gas environments.
Maintenance and use:
Regular inspection: Regularly check the status of the gas supply system and the connection of the gas box motherboard to ensure its normal operation.
Gas compatibility: Ensure that the gas used is compatible with the system and avoid damaging the equipment.
Cleaning and Calibration: Regularly clean and calibrate the motherboard to ensure gas control accuracy and system stability.
The gas box motherboard ensures the stability and high-precision regulation of the gas supply system in semiconductor equipment, and is an important component in ensuring high-precision production processes.
2.產 品 展 示
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