LAM 810-017075-013氣體盒互鎖模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
LAM 810-017075-013 是一款 氣體盒互鎖模塊，主要用于半導(dǎo)體制造設(shè)備中的氣體管理系統(tǒng)，確保氣體流量和氣體設(shè)備的安全互鎖操作。以下是其主要特點(diǎn)：
氣體互鎖保護(hù)：該模塊確保氣體系統(tǒng)與其他設(shè)備的安全互鎖，防止在不安全的情況下啟動(dòng)氣體設(shè)備，避免氣體泄漏和其他潛在危險(xiǎn)。
實(shí)時(shí)監(jiān)控：能夠?qū)崟r(shí)監(jiān)控氣體流量、壓力等關(guān)鍵參數(shù)，并在異常情況下自動(dòng)觸發(fā)警報(bào)或保護(hù)機(jī)制。
多重安全保護(hù)：具備多重保護(hù)功能，如過(guò)壓、過(guò)流和氣體泄漏監(jiān)測(cè)，確保設(shè)備安全穩(wěn)定運(yùn)行。
集成化設(shè)計(jì)：將氣體互鎖、監(jiān)控和報(bào)警功能集成到一個(gè)模塊中，簡(jiǎn)化系統(tǒng)架構(gòu)，減少設(shè)備復(fù)雜性。
遠(yuǎn)程診斷與控制：支持遠(yuǎn)程監(jiān)控和控制，便于操作員進(jìn)行實(shí)時(shí)監(jiān)測(cè)和故障診斷，提高設(shè)備維護(hù)效率。
兼容性強(qiáng)：與不同類型的氣體設(shè)備和氣體控制系統(tǒng)兼容，能夠適應(yīng)多種應(yīng)用環(huán)境。
高可靠性與耐用性：采用工業(yè)級(jí)設(shè)計(jì)，能夠在高溫、高濕等惡劣環(huán)境下長(zhǎng)期穩(wěn)定工作。
模塊化設(shè)計(jì)：便于安裝、維護(hù)和替換，減少停機(jī)時(shí)間，確保生產(chǎn)線高效運(yùn)行。
該氣體盒互鎖模塊廣泛應(yīng)用于半導(dǎo)體、光電、化學(xué)加工等高精度制造領(lǐng)域，用于氣體安全管理和保護(hù)，保障生產(chǎn)過(guò)程中氣體設(shè)備的安全性和穩(wěn)定性。
英文資料：
LAM 810-017075-013 is a gas box interlock module mainly used in gas management systems in semiconductor manufacturing equipment to ensure safe interlock operation of gas flow and gas equipment. The following are its main characteristics:
Gas interlock protection: This module ensures the safe interlock of the gas system with other equipment, preventing the start of gas equipment in unsafe situations and avoiding gas leaks and other potential hazards.
Real time monitoring: It can monitor key parameters such as gas flow rate and pressure in real time, and automatically trigger alarms or protection mechanisms in case of abnormal situations.
Multiple safety protection: Equipped with multiple protection functions, such as overvoltage, overcurrent, and gas leakage monitoring, to ensure the safe and stable operation of the equipment.
Integrated design: Integrating gas interlocking, monitoring, and alarm functions into one module, simplifying system architecture and reducing equipment complexity.
Remote diagnosis and control: Supports remote monitoring and control, facilitating real-time monitoring and fault diagnosis for operators, and improving equipment maintenance efficiency.
Strong compatibility: Compatible with different types of gas equipment and gas control systems, able to adapt to various application environments.
High reliability and durability: Adopting industrial grade design, it can work stably for a long time in harsh environments such as high temperature and high humidity.
Modular design: facilitates installation, maintenance, and replacement, reduces downtime, and ensures efficient operation of the production line.
This gas box interlock module is widely used in high-precision manufacturing fields such as semiconductors, optoelectronics, and chemical processing, for gas safety management and protection, ensuring the safety and stability of gas equipment during the production process.
2.產(chǎn) 品 展 示
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