LAM 810-073479-005氣體盒主板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
LAM 810-073479-005 是一款 氣體盒主板，主要用于半導(dǎo)體制造設(shè)備中的氣體控制和分配系統(tǒng)。以下是其主要特點(diǎn)：
精確氣體控制：提供精確的氣體流量控制和分配功能，確保生產(chǎn)過程中的氣體供應(yīng)穩(wěn)定可靠。
多通道支持：支持多個氣體通道的控制，可以同時管理多個氣體源，提高生產(chǎn)效率。
高靈敏度監(jiān)控：集成氣體傳感器接口，可實(shí)時監(jiān)控氣體濃度和流量，確保安全和穩(wěn)定運(yùn)行。
兼容性強(qiáng)：與多種氣體類型和設(shè)備兼容，適應(yīng)不同制造工藝需求。
遠(yuǎn)程監(jiān)控與管理：支持通過網(wǎng)絡(luò)進(jìn)行遠(yuǎn)程監(jiān)控和診斷，便于設(shè)備管理和故障排查。
保護(hù)功能：具備氣體泄漏檢測、過壓保護(hù)等安全功能，防止設(shè)備和人員受到傷害。
穩(wěn)定性與耐用性：設(shè)計符合工業(yè)標(biāo)準(zhǔn)，能夠在高溫、濕度等惡劣環(huán)境下長期穩(wěn)定運(yùn)行。
集成化設(shè)計：將氣體控制和監(jiān)控功能集成到一個模塊中，減少設(shè)備體積，簡化系統(tǒng)設(shè)計。
該氣體盒主板廣泛應(yīng)用于半導(dǎo)體生產(chǎn)線、刻蝕、清洗等工藝中，確保氣體的精準(zhǔn)控制與安全使用，提升生產(chǎn)效率和設(shè)備安全性。
英文資料：
LAM 810-073479-005 is a gas box motherboard mainly used for gas control and distribution systems in semiconductor manufacturing equipment. The following are its main characteristics:
Accurate gas control: Provides precise gas flow control and distribution functions to ensure stable and reliable gas supply during the production process.
Multi channel support: supports control of multiple gas channels, can manage multiple gas sources simultaneously, and improve production efficiency.
High sensitivity monitoring: Integrated gas sensor interface, can monitor gas concentration and flow in real time, ensuring safe and stable operation.
Strong compatibility: Compatible with multiple gas types and devices, suitable for different manufacturing process requirements.
Remote monitoring and management: Supports remote monitoring and diagnosis through the network, facilitating device management and troubleshooting.
Protection function: It has safety functions such as gas leak detection and overpressure protection to prevent equipment and personnel from being injured.
Stability and durability: Designed to meet industrial standards, it can operate stably for a long time in harsh environments such as high temperature and humidity.
Integrated design: Integrating gas control and monitoring functions into one module, reducing equipment size and simplifying system design.
This gas box motherboard is widely used in semiconductor production lines, etching, cleaning and other processes to ensure precise control and safe use of gases, improve production efficiency and equipment safety.
2.產(chǎn) 品 展 示
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