GRANVILLE-PHILLIPS 360120雙真空離子計 PDF資料
1.產 品 資 料 介 紹:
中文資料:
GRANVILLE-PHILLIPS 360120 雙真空離子計是一種高精度真空測量儀器,專用于超高真空(UHV)和極高真空(XHV)環境下的壓力測量。此離子計適用于半導體、科研實驗室和高能物理等需要準確壓力控制的行業。它的雙離子計設計能夠提高測量的范圍和穩定性,適應從高真空到極高真空的廣泛壓力范圍。
產品特點
- 雙離子計結構:雙離子計設計確保在寬壓力范圍內提供準確、穩定的測量,尤其適合從低真空到超高真空的壓力監控。
- 高靈敏度與精確性:能夠測量從 到 Torr 的壓力,精度極高,適合要求嚴格的應用環境。
- 快速響應時間:在高低真空轉換時響應速度快,幫助用戶即時了解真空狀態。
- 多種輸出選項:支持多種通信接口,如模擬和數字輸出,便于與其他設備或系統集成。
- 耐用設計:采用耐腐蝕材料制成,適用于具有腐蝕性氣體或粉塵的環境,同時延長設備使用壽命。
技術規格
- 壓力范圍: 到 Torr
- 響應時間:亞秒級
- 電源輸入:一般為24V DC或110-240V AC(取決于具體型號)
- 工作溫度:-20°C 至 50°C
- 接口:提供多種信號輸出選項,包括模擬輸出和RS-232/RS-485數字接口
- 尺寸與重量:緊湊設計,易于安裝在實驗設備或生產線中
應用領域
- 半導體制造:廣泛應用于真空鍍膜、離子注入和蝕刻等設備,確保工藝真空度。
- 科研實驗室:用于核物理、材料科學等實驗中的真空環境測量。
- 高能物理:在粒子加速器、質譜儀等設備中監測真空狀態。
- 航天和航空:用于空間模擬和真空測試設備中,確保高真空環境的維持。
使用和維護
- 維護簡單:模塊化設計使得更換和校準離子計頭更加便捷。
- 自動診斷功能:該設備具有自檢功能,能自動檢測運行狀態并提醒用戶進行維護或故障排除。
- 定期校準:建議根據設備使用頻率和真空環境,定期進行校準,確保測量精度。
英文資料:
GRANVILLE-PHILLIPS 360120 dual vacuum ionizer is a high-precision vacuum measuring instrument designed for pressure measurement in ultra-high vacuum (UHV) and extremely high vacuum (XHV) environments. This ion meter is suitable for industries such as semiconductors, research laboratories, and high-energy physics that require accurate pressure control. Its dual ion meter design can improve the measurement range and stability, adapting to a wide pressure range from high vacuum to extremely high vacuum.
Response time: sub second level
Power input: Generally 24V DC or 110-240V AC (depending on the specific model)
Working temperature: -20 ° C to 50 ° C
Interface: Provides multiple signal output options, including analog output and RS-232/RS-485 digital interface
Size and weight: Compact design, easy to install in experimental equipment or production lines
application area
Semiconductor manufacturing: widely used in equipment such as vacuum coating, ion implantation, and etching to ensure the vacuum degree of the process.
Research laboratory: used for vacuum environment measurement in experiments such as nuclear physics and materials science.
High energy physics: monitoring the vacuum state in equipment such as particle accelerators and mass spectrometers.
Aerospace and aviation: used in space simulation and vacuum testing equipment to ensure the maintenance of high vacuum environments.
Usage and maintenance
Easy maintenance: Modular design makes it more convenient to replace and calibrate ion meter heads.
Automatic diagnostic function: This device has a self checking function, which can automatically detect the operating status and remind users to perform maintenance or troubleshooting.
Regular calibration: It is recommended to perform regular calibration based on the frequency of equipment use and vacuum environment to ensure measurement accuracy.
2.產 品 展 示
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PMA45Q-10100-00 | AMAT 0100-00177 | PFRL101A 0.5KN |
PMA45N-01100-00 | AMAT 0100-35263 | PFRL101D |
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