Brooks 002-102369控制器模塊 PDF資料
1.產 品 資 料 介 紹：
中文資料：
Brooks 002-102369 控制器模塊 是Brooks Instrument公司生產的用于流量控制和自動化系統的組件之一，通常被用于精密氣體流量控制、半導體制造、化學處理以及其他高精度要求的應用。它是一款集成化的控制模塊，常與Brooks的流量控制器和傳感器系統配合使用，用于實現氣體和液體流量的精確調節。
主要特點：
流量控制能力：
- Brooks 002-102369 控制器模塊設計用于精確控制氣體或液體流量，可以與流量傳感器和流量閥配合使用，提供實時流量調節。
- 它支持不同類型的流量計和流量傳感器，如質量流量計（MFC）或體積流量計，以滿足不同的流量控制需求。
高精度與穩定性：
- 該控制模塊具有高精度的流量控制功能，能夠精確調節流量，確保在極小的波動范圍內穩定運行。這對于許多對流量要求非常嚴格的應用（如半導體工藝、化學處理）非常關鍵。
通訊接口：
- Modbus、Ethernet/IP 和 RS-232/RS-485 等標準通訊接口，使得該控制器能夠與上位計算機系統、自動化控制系統或其他設備進行無縫集成。
- 支持通過網絡與其他設備進行遠程監控、控制和數據采集。
靈活的配置選項：
- PID 控制：可以通過PID調節算法來自動調整輸出，確保流量穩定和控制精度。
- 多種流量設置：支持多種流量范圍的配置，適應不同應用場景，如高流量或低流量精度要求的應用。
用戶友好的界面：
- 提供直觀的顯示和操作界面，使得用戶在安裝、配置和調試過程中更加方便。
- 在診斷和維護方面，提供清晰的反饋信息，幫助操作人員快速排除故障。
環境適應性：
- 該控制器模塊設計適應于工業環境中的多種挑戰，具有較強的抗干擾能力，能夠在高溫、高濕度或惡劣的電磁環境下穩定運行。
應用領域：
半導體制造：
- 在半導體工藝中，精確的氣體流量控制對薄膜沉積、化學氣相沉積（CVD）、刻蝕等過程至關重要。Brooks 002-102369 控制器模塊能夠確保氣體流量穩定且準確，減少工藝波動，提高產量和產品一致性。
化學加工：
- 用于化學反應中的氣體或液體流量控制，確保反應過程中化學物質的精確投放和流量管理，保證產品質量和反應效率。
實驗室應用：
- 許多高端實驗室或研究設施需要對氣體和液體流量進行精確調節，Brooks 002-102369 控制器模塊可以幫助實現這一需求，特別是在氣體分析和處理方面。
自動化控制系統：
- 在自動化控制系統中，流量控制器模塊通常與傳感器、執行器和其他自動化設備連接，共同工作實現生產線的自動化流量管理。
英文資料：
The Brooks 002-102369 controller module is one of the components produced by Brooks Instrument for flow control and automation systems, typically used in precision gas flow control, semiconductor manufacturing, chemical processing, and other high-precision applications. It is an integrated control module commonly used in conjunction with Brooks' flow controllers and sensor systems to achieve precise adjustment of gas and liquid flow rates.
Main features:
Flow control capability:
The Brooks 002-102369 controller module is designed for precise control of gas or liquid flow and can be used in conjunction with flow sensors and flow valves to provide real-time flow regulation.
It supports different types of flow meters and flow sensors, such as mass flow meters (MFCs) or volumetric flow meters, to meet different flow control requirements.
High precision and stability:
This control module has high-precision flow control function, which can accurately adjust the flow and ensure stable operation within a very small fluctuation range. This is crucial for many applications that have very strict flow requirements, such as semiconductor processes and chemical treatments.
Communication interface:
Standard communication interfaces such as Modbus, Ethernet/IP, and RS-232/RS-485 enable the controller to seamlessly integrate with host computer systems, automation control systems, or other devices.
Support remote monitoring, control, and data collection with other devices through the network.
Flexible configuration options:
PID control: The output can be automatically adjusted through PID adjustment algorithm to ensure stable flow and control accuracy.
Multiple traffic settings: Supports configuration of multiple traffic ranges to adapt to different application scenarios, such as applications with high or low traffic accuracy requirements.
User friendly interface:
Provide intuitive display and operation interface, making the installation, configuration, and debugging process more convenient for users.
In terms of diagnosis and maintenance, provide clear feedback information to help operators quickly troubleshoot problems.
Environmental adaptability:
The controller module is designed to adapt to various challenges in industrial environments, with strong anti-interference ability, and can operate stably in high temperature, high humidity, or harsh electromagnetic environments.
Application areas:
Semiconductor manufacturing:
Accurate gas flow control is crucial for processes such as thin film deposition, chemical vapor deposition (CVD), and etching in semiconductor manufacturing. The Brooks 002-102369 controller module ensures stable and accurate gas flow, reduces process fluctuations, and improves yield and product consistency.
Chemical processing:
Used for gas or liquid flow control in chemical reactions, ensuring precise dosing and flow management of chemical substances during the reaction process, ensuring product quality and reaction efficiency.
Laboratory applications:
Many high-end laboratories or research facilities require precise regulation of gas and liquid flow rates, and the Brooks 002-102369 controller module can help meet this demand, especially in gas analysis and processing.
Automated control system:
In automation control systems, the flow controller module is usually connected to sensors, actuators, and other automation equipment to work together to achieve automated flow management of the production line.
2.產 品 展 示
3.其他產品
4.其他英文產品
AMAT 0190-66253 Communication Module
5.更多庫存型號
| PMB31B-20114-03 | AMAT 0100-00015 | PFTL301E |
| PMB31B-20114-02 | AMAT 0100-14010 | PFVL141V |
| PMB31B-20114-01 | IMFCS01 | 3BSE003816R1 SC520 |
| PMB31B-20114-00 | ICSM06A6 | N31HRFK-LNK-NS-00 |
| PMB31B-20101-03 | NKMF02-02 | M22NRXC-LDN-NS-00 |
| PMB31B-20101-02 | AMAT 0100-09210 | 57160001-UH DSTD 150 |
| PMB31B-20101-01 | AMAT 0100-20265 | PFRL 101C |
| PMB31B-20101-00 | 07KT93 | P21NSXS-LSS-NS-06 |
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