Brooks 002-7391-07晶圓對(duì)齊器 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Brooks 002-7391-07 晶圓對(duì)齊器 是 Brooks Automation 提供的一款高精度自動(dòng)化設(shè)備，主要用于晶圓制造、半導(dǎo)體工藝以及其他精密制造過(guò)程中的晶圓對(duì)位與對(duì)準(zhǔn)任務(wù)。它在晶圓處理過(guò)程中，確保晶圓的正確定位與對(duì)齊，從而提高制造過(guò)程的精度和效率。
主要特點(diǎn)和功能：
高精度對(duì)位：
- Brooks 002-7391-07 晶圓對(duì)齊器 采用先進(jìn)的光學(xué)和機(jī)械技術(shù)，能夠在極高的精度下執(zhí)行晶圓對(duì)準(zhǔn)操作。其精度通常可達(dá)到微米級(jí)別，確保晶圓在后續(xù)處理過(guò)程中的位置精確無(wú)誤。
自動(dòng)化操作：
- 該對(duì)齊器支持全自動(dòng)化操作，能夠自動(dòng)進(jìn)行晶圓的加載、對(duì)位、校準(zhǔn)和卸載。自動(dòng)化設(shè)計(jì)減少了人工干預(yù)，提升了工作效率和一致性。
兼容多種晶圓尺寸：
- 該設(shè)備能夠處理不同尺寸的晶圓，包括常見(jiàn)的 200mm 和 300mm 晶圓，適用于多種半導(dǎo)體工藝和光伏應(yīng)用。
實(shí)時(shí)監(jiān)控與反饋：
- 設(shè)備具備實(shí)時(shí)監(jiān)控功能，能夠?qū)崟r(shí)監(jiān)控晶圓對(duì)位狀態(tài)。通過(guò)反饋機(jī)制，系統(tǒng)能夠調(diào)整晶圓的位置，確保對(duì)齊的準(zhǔn)確性。
高可靠性與穩(wěn)定性：
- Brooks 002-7391-07 晶圓對(duì)齊器 設(shè)計(jì)具有高抗干擾能力，能夠在惡劣環(huán)境下穩(wěn)定工作。它的耐用性使其在半導(dǎo)體和光伏行業(yè)中得到廣泛應(yīng)用，能確保長(zhǎng)時(shí)間連續(xù)穩(wěn)定運(yùn)行。
模塊化設(shè)計(jì)：
- 該設(shè)備具有模塊化設(shè)計(jì)，可以根據(jù)實(shí)際需求靈活配置不同的對(duì)位模塊，適應(yīng)不同的生產(chǎn)需求和工藝要求。
易于集成：
- 該對(duì)齊器能夠與其他半導(dǎo)體生產(chǎn)設(shè)備，如刻蝕機(jī)、光刻機(jī)、薄膜沉積機(jī)等設(shè)備進(jìn)行無(wú)縫集成。其標(biāo)準(zhǔn)化接口支持快速與現(xiàn)有自動(dòng)化生產(chǎn)線的集成。
支持多種控制協(xié)議：
- 支持 Ethernet/IP、Modbus TCP/IP 和 RS-232/485 等多種工業(yè)通信協(xié)議，確保能夠與其他設(shè)備進(jìn)行高效通信和數(shù)據(jù)傳輸。
簡(jiǎn)化維護(hù)：
- 該對(duì)齊器設(shè)計(jì)簡(jiǎn)潔，具有易于訪問(wèn)的維護(hù)接口，使得維護(hù)和修理過(guò)程更加高效，減少停機(jī)時(shí)間。
英文資料：
The Brooks 002-7391-07 wafer aligner is a high-precision automation equipment provided by Brooks Automation, mainly used for wafer alignment and alignment tasks in wafer manufacturing, semiconductor processes, and other precision manufacturing processes. It ensures the correct positioning and alignment of the wafer during wafer processing, thereby improving the accuracy and efficiency of the manufacturing process.
Main features and functions:
High precision alignment:
The Brooks 002-7391-07 wafer aligner utilizes advanced optical and mechanical technologies to perform wafer alignment operations with extremely high precision. Its accuracy can usually reach the micrometer level, ensuring precise positioning of the wafer during subsequent processing.
Automated operation:
This aligner supports fully automated operations and can automatically load, align, calibrate, and unload wafers. Automated design reduces manual intervention, improves work efficiency and consistency.
Compatible with multiple wafer sizes:
This device is capable of processing wafers of different sizes, including common 200mm and 300mm wafers, and is suitable for various semiconductor processes and photovoltaic applications.
Real time monitoring and feedback:
The equipment has real-time monitoring function, which can monitor the wafer alignment status in real time. Through a feedback mechanism, the system can adjust the position of the wafer to ensure accurate alignment.
High reliability and stability:
The Brooks 002-7391-07 wafer aligner design has high anti-interference ability and can operate stably in harsh environments. Its durability makes it widely used in the semiconductor and photovoltaic industries, ensuring long-term continuous and stable operation.
Modular design:
This device has a modular design that allows for flexible configuration of different alignment modules according to actual needs, adapting to different production and process requirements.
Easy to integrate:
This aligner can be seamlessly integrated with other semiconductor production equipment, such as etching machines, lithography machines, thin film deposition machines, etc. Its standardized interface supports rapid integration with existing automated production lines.
Supports multiple control protocols:
Supports various industrial communication protocols such as Ethernet/IP, Modbus TCP/IP, and RS-232/485, ensuring efficient communication and data transmission with other devices.
Simplified maintenance:
The aligner has a simple design and an easily accessible maintenance interface, making maintenance and repair processes more efficient and reducing downtime.
2.產(chǎn) 品 展 示
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5.更多庫(kù)存型號(hào)
| PMB31B-20101-01 | AMAT 0100-20265 | PFRL 101C |
| PMB31B-20101-00 | 07KT93 | P21NSXS-LSS-NS-06 |
| PMB31B-20100-03 | AMAT 0120-93660 | 57160001-PK DSDI 125 |
| PMB31B-20100-02 | PHARPS32000000 | M22NSXB-IDS-NS-02 |
| PMB31B-20100-01 | GJR5250000R0202 | N41HRFL-LNK-NS-00 |
| PMB31B-20100-00 | DOT100 | 57160001-ACX DSDP 140B |
| PMB31B-10216-03 | 07ZE88 | P22NRXA-LDN-HD-00 |
| PMB31B-10216-02 | 07YS80 | P21NRXA-LSS-NS-00 |
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