Brooks T1104-11-290-14氣體壓縮機模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Brooks T1104-11-290-14 氣體壓縮機模塊 是 Brooks Automation 提供的一款專用于半導(dǎo)體和其他高科技工業(yè)應(yīng)用中的氣體管理系統(tǒng)模塊。該氣體壓縮機模塊主要用于提供高壓氣體、精確控制氣體流量和壓力，以滿足特定的生產(chǎn)需求。氣體壓縮機模塊常見于氣體輸送、氣體配備系統(tǒng)及其他需要精準(zhǔn)氣體控制的自動化應(yīng)用。
主要特點和功能：
高效能氣體壓縮：
- Brooks T1104-11-290-14 氣體壓縮機模塊 設(shè)計用于高效壓縮氣體，能夠提供穩(wěn)定且可靠的氣體供應(yīng)，適用于需要持續(xù)、高壓氣體供應(yīng)的生產(chǎn)線和實驗室應(yīng)用。
精確的氣體流量控制：
- 配備高精度的流量控制系統(tǒng)，能夠精確控制氣體的流量和壓力。這對于半導(dǎo)體制造過程中對氣體供應(yīng)有嚴格要求的工藝（如刻蝕、薄膜沉積等）至關(guān)重要。
穩(wěn)定的輸出：
- 氣體壓縮機模塊的設(shè)計保證其在長時間的操作中保持穩(wěn)定的性能，能夠承受較高的工作負荷，適合24/7運行的工業(yè)環(huán)境。
自動化和智能控制：
- 該模塊配備智能控制系統(tǒng)，可以通過自動調(diào)節(jié)氣體流量和壓力，以適應(yīng)不同的工作需求。通過與其他自動化設(shè)備和控制系統(tǒng)集成，實現(xiàn)氣體管理的自動化，減少人工干預(yù)。
兼容性強：
- Brooks T1104-11-290-14 氣體壓縮機模塊 可與多種氣體輸送系統(tǒng)、氣體儲存設(shè)備以及其他實驗室或工業(yè)設(shè)備兼容使用。其靈活性使其成為多種氣體處理系統(tǒng)的核心組成部分。
高可靠性和耐用性：
- 該模塊采用高質(zhì)量的材料和先進的設(shè)計，以確保其在極端工作條件下仍能保持長時間的穩(wěn)定運行。其耐用性使其適合于苛刻的工業(yè)環(huán)境，減少維護和故障率。
低噪音和低振動設(shè)計：
- 氣體壓縮機模塊通常具有低噪音和低振動的特點，尤其在對操作環(huán)境有較高要求的實驗室或潔凈室中，能夠降低噪音污染，符合相關(guān)操作規(guī)范。
節(jié)能設(shè)計：
- 該氣體壓縮機模塊通過高效能設(shè)計，實現(xiàn)節(jié)能運行，在保證輸出穩(wěn)定的同時，降低能耗，幫助降低運營成本。
英文資料：
The Brooks T1104-11-290-14 gas compressor module is a gas management system module provided by Brooks Automation, specifically designed for semiconductor and other high-tech industrial applications. This gas compressor module is mainly used to provide high-pressure gas, accurately control gas flow and pressure to meet specific production needs. Gas compressor modules are commonly used in gas delivery, gas supply systems, and other automation applications that require precise gas control.
Main features and functions:
High efficiency gas compression:
The Brooks T1104-11-290-14 gas compressor module is designed for efficient gas compression, providing stable and reliable gas supply, suitable for production lines and laboratory applications that require continuous, high-pressure gas supply.
Accurate gas flow control:
Equipped with a high-precision flow control system, it can accurately control the flow rate and pressure of gases. This is crucial for processes in semiconductor manufacturing that have strict requirements for gas supply, such as etching, thin film deposition, etc.
Stable output:
The design of the gas compressor module ensures stable performance during long-term operation, can withstand high workloads, and is suitable for 24/7 industrial environments.
Automation and intelligent control:
This module is equipped with an intelligent control system that can automatically adjust gas flow and pressure to meet different work requirements. By integrating with other automation equipment and control systems, achieve automation of gas management and reduce manual intervention.
Strong compatibility:
The Brooks T1104-11-290-14 gas compressor module is compatible with various gas delivery systems, gas storage equipment, and other laboratory or industrial equipment. Its flexibility makes it a core component of various gas processing systems.
High reliability and durability:
This module adopts high-quality materials and advanced design to ensure its stable operation for a long time even under extreme working conditions. Its durability makes it suitable for harsh industrial environments, reducing maintenance and failure rates.
Low noise and low vibration design:
Gas compressor modules typically have the characteristics of low noise and low vibration, especially in laboratories or clean rooms with high requirements for operating environments, which can reduce noise pollution and comply with relevant operating standards.
Energy saving design:
The gas compressor module achieves energy-saving operation through efficient design, ensuring stable output while reducing energy consumption and helping to lower operating costs.
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