Brooks 017-0266-01晶圓處理機器人 PDF資料
1.產 品 資 料 介 紹:
中文資料:
Brooks 017-0266-01 晶圓處理機器人 是一款專為半導體制造行業設計的機器人系統,廣泛用于晶圓的處理、搬運和傳送。這種機器人能夠在精密和自動化的半導體生產過程中提供高效的物料搬運和操作支持,尤其在晶圓的存取、傳輸和精確定位方面具有重要應用。
主要特點:
高精度搬運與傳送:
- Brooks 017-0266-01 晶圓處理機器人具有高精度的定位和搬運能力,能夠確保晶圓在搬運過程中的完好無損,避免因震動、靜電或其他外界因素對晶圓造成的損害。
自動化控制系統:
- 該機器人配備先進的自動化控制系統,可以實現全自動化操作。通過高度集成的控制軟件,可以與生產線上的其他設備進行無縫對接和協調工作,確保高效的工作流和生產節奏。
高負載能力和穩定性:
- 機器人設計可以承載較大的負載,并且能夠在高速移動時保持穩定,適應半導體制造環境中的各種任務,包括晶圓的搬運、洗滌、傳送等。
支持復雜的路徑規劃:
- Brooks 017-0266-01 機器人支持復雜的路徑規劃和動態路徑調整,能夠靈活應對生產環境中的變化,同時確保高精度和高效性。
兼容性強:
- 該機器人與許多半導體生產設備兼容,如晶圓傳輸系統(FOUP、SMIF)、清洗系統、檢測設備等,能夠在復雜的制造環境中協同工作。
簡化的操作界面:
- 操作界面設計簡潔、易于使用,使得設備操作員可以快速掌握機器人的操作方式,同時也便于集成到自動化生產流程中。
耐用性和適應性:
- 機器人采用工業級設計,具備優異的耐用性和適應性,能夠在高度潔凈的環境(如ISO 14644 Class 1級別的潔凈室)中穩定工作,符合半導體行業的高標準要求。
英文資料:
Brooks 017-0266-01 Wafer Processing Robot is a robot system designed specifically for the semiconductor manufacturing industry, widely used for wafer processing, handling, and transportation. This type of robot can provide efficient material handling and operational support in precision and automated semiconductor production processes, especially in wafer access, transportation, and precise positioning, which have important applications.
Main features:
High precision handling and transportation:
The Brooks 017-0266-01 wafer processing robot has high-precision positioning and handling capabilities, which can ensure the integrity of wafers during handling and avoid damage caused by vibration, static electricity, or other external factors.
Automated control system:
The robot is equipped with an advanced automation control system, which can achieve fully automated operation. Through highly integrated control software, seamless integration and coordination with other devices on the production line can be achieved, ensuring efficient workflow and production pace.
High load capacity and stability:
Robot design can carry large loads and maintain stability during high-speed movement, adapting to various tasks in the semiconductor manufacturing environment, including wafer handling, washing, and transportation.
Support complex path planning:
Brooks 017-0266-01 robot supports complex path planning and dynamic path adjustment, enabling flexible response to changes in the production environment while ensuring high precision and efficiency.
Strong compatibility:
This robot is compatible with many semiconductor production equipment, such as wafer transfer systems (FOUP, SMIF), cleaning systems, inspection equipment, etc., and can work collaboratively in complex manufacturing environments.
Simplified operating interface:
The interface design is simple and easy to use, allowing equipment operators to quickly grasp the operation mode of the robot and also facilitate integration into automated production processes.
Durability and adaptability:
The robot adopts industrial grade design, with excellent durability and adaptability, and can work stably in highly clean environments (such as ISO 14644 Class 1 cleanrooms), meeting the high standard requirements of the semiconductor industry.
2.產 品 展 示
3.其他產品
BENTLY 1900/55 190055-0Z-01-01-01地震監測模塊
4.其他英文產品
GESVDU-1D-8946 Input/Output Module
ABB UN0807C-P Programmable Controller
5.更多庫存型號
PMB31B-20100-03 | AMAT 0120-93660 | 57160001-PK DSDI 125 |
PMB31B-20100-02 | PHARPS32000000 | M22NSXB-IDS-NS-02 |
PMB31B-20100-01 | GJR5250000R0202 | N41HRFL-LNK-NS-00 |
PMB31B-20100-00 | DOT100 | 57160001-ACX DSDP 140B |
PMB31B-10216-03 | 07ZE88 | P22NRXA-LDN-HD-00 |
PMB31B-10216-02 | 07YS80 | P21NRXA-LSS-NS-00 |
PMB31B-10216-01 | AMAT 0090-A8211 | PXUB201 |
PMB31B-10216-00 | AMAT 0100-00010 | 57160001-UNC DSTD 150B |
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