BROOKS 162770-01 負(fù)載端口 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Brooks Automation 162770-01 負(fù)載端口（Load Port）是半導(dǎo)體制造設(shè)備中的關(guān)鍵組件，用于在生產(chǎn)過程中安全地傳輸和處理晶圓。負(fù)載端口通常是將晶圓從外部的承載容器（如FOUP、FOSB）引入到生產(chǎn)設(shè)備中的接口，確保晶圓在不同處理階段之間的無縫轉(zhuǎn)換和運(yùn)輸。
主要特點(diǎn)：
自動(dòng)化晶圓處理：
- Brooks 162770-01 負(fù)載端口能夠與自動(dòng)化生產(chǎn)設(shè)備集成，實(shí)現(xiàn)全自動(dòng)化的晶圓裝載和卸載。它通過機(jī)械臂或晶圓傳輸系統(tǒng)將晶圓從承載容器中提取出來，并將其輸送到下一工序。
高效傳輸：
- 設(shè)計(jì)用于快速、安全地傳輸晶圓，減少在制造過程中可能發(fā)生的損壞或污染。它能夠顯著提高生產(chǎn)線的效率。
潔凈室兼容：
- 負(fù)載端口設(shè)備符合半導(dǎo)體制造中的潔凈室標(biāo)準(zhǔn)，能夠在無塵環(huán)境下操作，防止晶圓受到顆粒或其他污染物的影響。
多晶圓尺寸支持：
- Brooks 的負(fù)載端口通常能夠支持多種晶圓尺寸，適用于150mm、200mm和300mm等尺寸的晶圓，滿足現(xiàn)代半導(dǎo)體制造工藝的不同需求。
與多種設(shè)備兼容：
- 該負(fù)載端口可以與各類半導(dǎo)體制造設(shè)備如刻蝕機(jī)、沉積設(shè)備、測(cè)量設(shè)備等無縫集成，廣泛應(yīng)用于多種半導(dǎo)體制造工藝中。
精準(zhǔn)對(duì)位：
- Brooks 162770-01 配備高精度對(duì)位系統(tǒng)，確保晶圓在進(jìn)入設(shè)備之前保持精確的定位，避免晶圓錯(cuò)位或損壞。
應(yīng)用場(chǎng)景：
Brooks 162770-01 負(fù)載端口廣泛應(yīng)用于半導(dǎo)體制造中的以下環(huán)節(jié)：
- 晶圓裝載與卸載
- 光刻設(shè)備中的晶圓傳輸
- 刻蝕、沉積、清洗等工藝設(shè)備的晶圓輸入
- 晶圓測(cè)試與計(jì)量環(huán)節(jié)
英文資料：
Brooks Automation 162770-01 Load Port is a critical component in semiconductor manufacturing equipment used to safely transport and process wafers during the production process. The load port is usually an interface that introduces wafers from external carrier containers (such as FOUP, FOSB) into production equipment, ensuring seamless conversion and transportation of wafers between different processing stages.
Main features:
Automated wafer processing:
The Brooks 162770-01 load port can be integrated with automated production equipment to achieve fully automated wafer loading and unloading. It extracts wafers from the carrier container through a robotic arm or wafer transfer system and transports them to the next process.
Efficient transmission:
Designed for fast and safe transfer of wafers, reducing potential damage or contamination during the manufacturing process. It can significantly improve the efficiency of the production line.
Cleanroom compatibility:
The load port equipment complies with the cleanroom standards in semiconductor manufacturing and can operate in a dust-free environment to prevent the wafer from being affected by particles or other contaminants.
Multi wafer size support:
Brooks' load ports typically support multiple wafer sizes, suitable for wafers of 150mm, 200mm, and 300mm sizes, meeting the different requirements of modern semiconductor manufacturing processes.
Compatible with multiple devices:
This load port can be seamlessly integrated with various semiconductor manufacturing equipment such as etching machines, deposition equipment, measurement equipment, etc., and is widely used in various semiconductor manufacturing processes.
Accurate alignment:
Brooks 162770-01 is equipped with a high-precision alignment system to ensure precise positioning of wafers before entering the equipment, avoiding wafer misalignment or damage.
Application scenarios:
Brooks 162770-01 load port is widely used in the following aspects of semiconductor manufacturing:
Wafer loading and unloading
Wafer transfer in lithography equipment
Wafer input for etching, deposition, cleaning and other process equipment
Wafer testing and metrology process
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
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5.更多庫存型號(hào)
| PMB33C-00100-03 | 07KT228 | P21NRXB-LDN-NS-00 |
| PMB33C-00100-02 | NKTU011 | M21NRXA-JDS-NS-02 |
| PMB33C-00100-01 | AMAT 0100-1401 | PFVL141C |
| PMB33C-00100-00 | AMAT 0100-01415 | PFRL101A 1.0KN 3BSE023317R0002 |
| PMB32E-20114-00 | PMKHRMPBA10001 | P2HNSXB-LNN-NS-02 |
| PMB32D-10100-00 | AMAT 0100-20135 | PFTL101BER 5.0KN |
| PMB32D-00201-00 | Amat 0100-20213 | PFTL201D 50.0KN |
| PMB32D-00200-03 | 07KT92 | P2HNSXB-LDF-SS-02 |
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