Brooks Automation 002-7391-07晶圓對(duì)準(zhǔn)器 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Brooks Automation 002-7391-07 是一款晶圓對(duì)準(zhǔn)器（Wafer Aligner），用于半導(dǎo)體制造過程中的晶圓處理和定位。晶圓對(duì)準(zhǔn)器的主要功能是在晶圓進(jìn)入加工設(shè)備之前，對(duì)其進(jìn)行精確的對(duì)齊和定位，確保后續(xù)工藝能夠在晶圓的正確位置上進(jìn)行操作。
主要特點(diǎn)：
高精度對(duì)準(zhǔn)：
- Brooks 002-7391-07 晶圓對(duì)準(zhǔn)器具備極高的對(duì)準(zhǔn)精度，可以對(duì)晶圓進(jìn)行亞微米級(jí)的定位，確保后續(xù)工藝（如光刻、刻蝕等）在晶圓的正確位置上進(jìn)行。
快速對(duì)準(zhǔn)：
- 該對(duì)準(zhǔn)器設(shè)計(jì)用于快速完成對(duì)齊過程，從而減少生產(chǎn)線的等待時(shí)間，提升整體生產(chǎn)效率。
支持多種晶圓尺寸：
- 支持不同尺寸的晶圓（如150mm、200mm或300mm等），適應(yīng)現(xiàn)代半導(dǎo)體制造的多樣化需求。
潔凈室兼容：
- 設(shè)計(jì)符合潔凈室環(huán)境的要求，防止顆粒污染，確保晶圓在對(duì)準(zhǔn)過程中不會(huì)受到任何污染物影響。
自動(dòng)化集成：
- 可與自動(dòng)化晶圓傳輸系統(tǒng)無縫集成，實(shí)現(xiàn)從傳輸?shù)綄?duì)準(zhǔn)的全自動(dòng)化過程，減少人工干預(yù)并提高生產(chǎn)線的自動(dòng)化程度。
應(yīng)用場(chǎng)景：
Brooks Automation 002-7391-07 晶圓對(duì)準(zhǔn)器廣泛應(yīng)用于半導(dǎo)體制造過程的多個(gè)環(huán)節(jié)，尤其是在以下幾個(gè)工藝階段：
- 光刻（Lithography）
- 薄膜沉積（Deposition）
- 刻蝕（Etching）
- 測(cè)試和計(jì)量（Test and Metrology）
英文資料：
Brooks Automation 002-7391-07 is a wafer aligner used for wafer processing and positioning in semiconductor manufacturing processes. The main function of a wafer aligner is to accurately align and position the wafer before it enters the processing equipment, ensuring that subsequent processes can operate in the correct position on the wafer.
Main features:
High precision alignment:
The Brooks 002-7391-07 wafer aligner has extremely high alignment accuracy and can perform sub micron level positioning on wafers, ensuring that subsequent processes (such as photolithography, etching, etc.) are carried out in the correct position on the wafer.
Quick alignment:
This aligner is designed to quickly complete the alignment process, thereby reducing waiting time on the production line and improving overall production efficiency.
Supports multiple wafer sizes:
Supports wafers of different sizes (such as 150mm, 200mm, or 300mm) to meet the diverse needs of modern semiconductor manufacturing.
Cleanroom compatibility:
Design to meet the requirements of a clean room environment, prevent particle contamination, and ensure that the wafer is not affected by any contaminants during alignment.
Automated integration:
It can be seamlessly integrated with automated wafer transfer systems to achieve fully automated processes from transfer to alignment, reducing manual intervention and improving the automation level of the production line.
Application scenarios:
Brooks Automation 002-7391-07 wafer aligner is widely used in multiple stages of semiconductor manufacturing, especially in the following process stages:
Lithography
Thin film deposition
Etching
Testing and Metrology
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
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GESVDU-1D-8946 Input/Output Module
5.更多庫存型號(hào)
| PMB33C-00101-03 | AMAT 0100-00161 | PFTL101A 2.0KN 3BSE004172R1 |
| PMB33C-00101-02 | 3BSE019202R1 | 57120001-NH DSTA 145A |
| PMB33C-00101-01 | AMAT 129-0401 | 57160001-NV DSDI 115 |
| PMB33C-00101-00 | 07KP60R101 | P21NRHS-LNF-NS-02 |
| PMB33C-00100-03 | 07KT228 | P21NRXB-LDN-NS-00 |
| PMB33C-00100-02 | NKTU011 | M21NRXA-JDS-NS-02 |
| PMB33C-00100-01 | AMAT 0100-1401 | PFVL141C |
| PMB33C-00100-00 | AMAT 0100-01415 | PFRL101A 1.0KN 3BSE023317R0002 |
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