Brooks Automation 002-7391-07晶圓對準器 PDF資料
1.產 品 資 料 介 紹：
中文資料：
Brooks Automation 002-7391-07 是一款晶圓對準器（Wafer Aligner），用于半導體制造過程中的晶圓處理和定位。晶圓對準器的主要功能是在晶圓進入加工設備之前，對其進行精確的對齊和定位，確保后續工藝能夠在晶圓的正確位置上進行操作。
主要特點：
高精度對準：
- Brooks 002-7391-07 晶圓對準器具備極高的對準精度，可以對晶圓進行亞微米級的定位，確保后續工藝（如光刻、刻蝕等）在晶圓的正確位置上進行。
快速對準：
- 該對準器設計用于快速完成對齊過程，從而減少生產線的等待時間，提升整體生產效率。
支持多種晶圓尺寸：
- 支持不同尺寸的晶圓（如150mm、200mm或300mm等），適應現代半導體制造的多樣化需求。
潔凈室兼容：
- 設計符合潔凈室環境的要求，防止顆粒污染，確保晶圓在對準過程中不會受到任何污染物影響。
自動化集成：
- 可與自動化晶圓傳輸系統無縫集成，實現從傳輸到對準的全自動化過程，減少人工干預并提高生產線的自動化程度。
應用場景：
Brooks Automation 002-7391-07 晶圓對準器廣泛應用于半導體制造過程的多個環節，尤其是在以下幾個工藝階段：
- 光刻（Lithography）
- 薄膜沉積（Deposition）
- 刻蝕（Etching）
- 測試和計量（Test and Metrology）
英文資料：
Brooks Automation 002-7391-07 is a wafer aligner used for wafer processing and positioning in semiconductor manufacturing processes. The main function of a wafer aligner is to accurately align and position the wafer before it enters the processing equipment, ensuring that subsequent processes can operate in the correct position on the wafer.
Main features:
High precision alignment:
The Brooks 002-7391-07 wafer aligner has extremely high alignment accuracy and can perform sub micron level positioning on wafers, ensuring that subsequent processes (such as photolithography, etching, etc.) are carried out in the correct position on the wafer.
Quick alignment:
This aligner is designed to quickly complete the alignment process, thereby reducing waiting time on the production line and improving overall production efficiency.
Supports multiple wafer sizes:
Supports wafers of different sizes (such as 150mm, 200mm, or 300mm) to meet the diverse needs of modern semiconductor manufacturing.
Cleanroom compatibility:
Design to meet the requirements of a clean room environment, prevent particle contamination, and ensure that the wafer is not affected by any contaminants during alignment.
Automated integration:
It can be seamlessly integrated with automated wafer transfer systems to achieve fully automated processes from transfer to alignment, reducing manual intervention and improving the automation level of the production line.
Application scenarios:
Brooks Automation 002-7391-07 wafer aligner is widely used in multiple stages of semiconductor manufacturing, especially in the following process stages:
Lithography
Thin film deposition
Etching
Testing and Metrology
2.產 品 展 示
3.其他產品
4.其他英文產品
ABB UN0821B-P redundant output module
GESVDU-1D-8946 Input/Output Module
5.更多庫存型號
| PMB33C-00101-03 | AMAT 0100-00161 | PFTL101A 2.0KN 3BSE004172R1 |
| PMB33C-00101-02 | 3BSE019202R1 | 57120001-NH DSTA 145A |
| PMB33C-00101-01 | AMAT 129-0401 | 57160001-NV DSDI 115 |
| PMB33C-00101-00 | 07KP60R101 | P21NRHS-LNF-NS-02 |
| PMB33C-00100-03 | 07KT228 | P21NRXB-LDN-NS-00 |
| PMB33C-00100-02 | NKTU011 | M21NRXA-JDS-NS-02 |
| PMB33C-00100-01 | AMAT 0100-1401 | PFVL141C |
| PMB33C-00100-00 | AMAT 0100-01415 | PFRL101A 1.0KN 3BSE023317R0002 |
本篇文章出自瑞昌明盛自動化設備有限公司官網，轉載請附上此鏈接:http://www.jiangxidcs.co
