Brooks 799-550205-001晶圓傳輸機器 PDF資料
1.產 品 資 料 介 紹:
中文資料:
Brooks Automation 799-550205-001 晶圓傳輸機器人是一款用于半導體制造中的精密設備,專門設計用于在制造過程中傳輸和處理晶圓。此類機器人通常應用于晶圓生產的各個階段,包括光刻、刻蝕、沉積等工藝,確保晶圓在設備之間安全、高效地移動。
主要特點:
高精度晶圓傳輸:
- 該型號機器人具備極高的精度,可確保晶圓在設備之間進行精準定位和對齊,以避免在處理過程中發生損壞或錯位。
潔凈室和真空兼容:
- 專為潔凈室和真空環境設計,符合半導體制造所需的嚴格潔凈標準,最大限度地減少顆粒污染風險。
可靠性和穩定性:
- Brooks 機器人以其高度可靠性著稱,能夠在長時間工作下保持穩定,減少因設備故障導致的停機時間,提高生產效率。
多功能性:
- 能夠適應不同尺寸的晶圓,并支持多種傳輸模式,確保其在半導體制造的各個階段都能高效運行。
緊湊設計:
- 該設備通常具備緊湊的外形設計,能夠有效節省潔凈室中的空間,便于集成到不同的制造設備或生產線上。
應用領域:
Brooks 799-550205-001 晶圓傳輸機器人主要用于半導體晶圓制造工藝中的關鍵步驟,包括:
- 晶圓刻蝕
- 化學氣相沉積(CVD)
- 物理氣相沉積(PVD)
- 光刻過程
- 等離子清洗
英文資料:
The Brooks Automation 799-550205-001 wafer transfer robot is a precision equipment used in semiconductor manufacturing, specifically designed for transferring and processing wafers during the manufacturing process. These types of robots are typically used in various stages of wafer production, including photolithography, etching, deposition, and other processes, to ensure the safe and efficient movement of wafers between equipment.
Main features:
High precision wafer transfer:
This model of robot has extremely high precision, ensuring precise positioning and alignment of wafers between devices to avoid damage or misalignment during processing.
Cleanroom and vacuum compatibility:
Specially designed for cleanrooms and vacuum environments, meeting the strict cleanliness standards required for semiconductor manufacturing, minimizing the risk of particle contamination to the greatest extent possible.
Reliability and stability:
Brooks robots are known for their high reliability, which can maintain stability over long periods of work, reduce downtime caused by equipment failures, and improve production efficiency.
Multifunctionality:
Capable of adapting to wafers of different sizes and supporting multiple transport modes, ensuring efficient operation at all stages of semiconductor manufacturing.
Compact design:
This device usually has a compact exterior design, which can effectively save space in the clean room and facilitate integration into different manufacturing equipment or production lines.
Application areas:
The Brooks 799-550205-001 wafer transfer robot is mainly used for key steps in semiconductor wafer manufacturing processes, including:
Wafer etching
Chemical Vapor Deposition (CVD)
Physical Vapor Deposition (PVD)
Photolithography process
Plasma cleaning
2.產 品 展 示
3.其他產品
4.其他英文產品
ABB UN0942b-P Programmable Controller
ABB UN0821B-P redundant output module
5.更多庫存型號
PMB33C-00114-03 | INLIM03 | UT 372 |
PMB33C-00114-02 | AMAT 0100-00852 | PFEA113 |
PMB33C-00114-01 | IPFLD48 | 546150 Terminal Block |
PMB33C-00114-00 | IMFEC12 | 3BSE000860R1 SB510 |
PMB33C-00101-03 | AMAT 0100-00161 | PFTL101A 2.0KN 3BSE004172R1 |
PMB33C-00101-02 | 3BSE019202R1 | 57120001-NH DSTA 145A |
PMB33C-00101-01 | AMAT 129-0401 | 57160001-NV DSDI 115 |
PMB33C-00101-00 | 07KP60R101 | P21NRHS-LNF-NS-02 |
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