Brooks 002-1600-25 27-126341-00晶圓傳輸機器人 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
Brooks Automation 002-1600-25 或 27-126341-00 是晶圓傳輸機器人,廣泛應(yīng)用于半導(dǎo)體制造過程。此類機器人以其高精度、可靠性和效率著稱,能夠在真空或受控環(huán)境中精確移動半導(dǎo)體晶圓。
以下是 Brooks 晶圓傳輸機器人的一些關(guān)鍵特點:
高精度:機器人能夠?qū)崿F(xiàn)高精度的晶圓擺放,對于半導(dǎo)體制造過程中保持晶圓的完整性和對齊性至關(guān)重要。
潔凈室兼容性:設(shè)計用于在潔凈室環(huán)境中運行,降低污染風(fēng)險,確保晶圓質(zhì)量不受影響。
真空兼容性:這些機器人可以在真空環(huán)境中工作,適合半導(dǎo)體制造中需要高度控制的氣氛條件。
高可靠性:Brooks 的晶圓傳輸機器人以其穩(wěn)定和長壽命的操作而聞名,能夠減少停機時間并提高生產(chǎn)效率。
快速傳輸:具備快速而精準(zhǔn)的晶圓傳輸能力,能夠提升生產(chǎn)線的整體效率。
Brooks Automation 的晶圓傳輸機器人被廣泛應(yīng)用于晶圓處理設(shè)備中,適合多種半導(dǎo)體制造步驟,包括光刻、刻蝕、沉積等工藝。
英文資料:
Brooks Automation 002-1600-25 or 27-126341-00 is a wafer transfer robot widely used in semiconductor manufacturing processes. This type of robot is known for its high precision, reliability, and efficiency, capable of accurately moving semiconductor wafers in vacuum or controlled environments.
Here are some key features of Brooks wafer transfer robots:
High precision: Robots can achieve high-precision wafer placement, which is crucial for maintaining the integrity and alignment of wafers in the semiconductor manufacturing process.
Cleanroom compatibility: Designed to operate in a cleanroom environment, reducing contamination risks and ensuring wafer quality is not affected.
Vacuum compatibility: These robots can work in a vacuum environment, suitable for highly controlled atmosphere conditions in semiconductor manufacturing.
High reliability: Brooks' wafer transfer robots are known for their stable and long-lasting operation, which can reduce downtime and improve production efficiency.
Fast transfer: With the ability to transfer wafers quickly and accurately, it can improve the overall efficiency of the production line.
Brooks Automation's wafer transfer robots are widely used in wafer processing equipment, suitable for various semiconductor manufacturing steps, including photolithography, etching, deposition, and other processes.
2.產(chǎn) 品 展 示
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5.更多庫存型號
PMB33C-00116-03 | IEPAF01 | 57160001-AZ DSTD 150 |
PMB33C-00116-02 | 07AB200 | P21NSXA-LSS-NS-02 |
PMB33C-00116-01 | 70 FA 01A | N34HRFM-LNK-NS-00 |
PMB33C-00116-00 | IMMFC04 | 3BSE001449R1 TC520 |
PMB33C-00114-03 | INLIM03 | UT 372 |
PMB33C-00114-02 | AMAT 0100-00852 | PFEA113 |
PMB33C-00114-01 | IPFLD48 | 546150 Terminal Block |
PMB33C-00114-00 | IMFEC12 | 3BSE000860R1 SB510 |
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