AGILENT 5517C激光頭 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
AGILENT 5517C 激光頭是一款高精度的激光干涉儀系統(tǒng)部件，常用于精密測量和定位系統(tǒng)中。它是 AGILENT（現(xiàn)為 Keysight Technologies）的 5517 系列激光干涉儀系統(tǒng)的一部分，廣泛應(yīng)用于精密機(jī)械、半導(dǎo)體制造、以及計量等高要求的測量領(lǐng)域。
主要特點(diǎn)：
高精度測量：
- 5517C 激光頭基于激光干涉原理，能夠提供亞納米級別的高精度位置、距離和速度測量，非常適合精密加工和制造行業(yè)。
穩(wěn)定性強(qiáng)：
- 該激光頭具有出色的光束穩(wěn)定性，即使在長時間運(yùn)行中也能保證測量的精度和一致性，適合需要高穩(wěn)定性的工業(yè)場合。
高頻輸出：
- AGILENT 5517C 提供高頻穩(wěn)定激光輸出，使其在動態(tài)測量和高精度定位中表現(xiàn)尤為突出。
低溫漂設(shè)計：
- 該激光頭對環(huán)境溫度的敏感性較低，即使在溫度變化的情況下，也能保持測量精度，提升了系統(tǒng)的可靠性。
集成化設(shè)計：
- 設(shè)計緊湊，便于與其他設(shè)備集成，如坐標(biāo)測量機(jī)（CMM）、半導(dǎo)體刻蝕設(shè)備和其他高精度儀器，節(jié)省空間并簡化系統(tǒng)構(gòu)建。
應(yīng)用場景：
- 半導(dǎo)體制造：用于光刻機(jī)等半導(dǎo)體設(shè)備中的精密定位和測量。
- 精密機(jī)床：用于機(jī)床的實(shí)時定位和尺寸測量，確保加工精度。
- 計量學(xué)：應(yīng)用于國家和企業(yè)實(shí)驗室中的精密計量系統(tǒng)。
- 光學(xué)設(shè)備校準(zhǔn)：用于光學(xué)系統(tǒng)和其他精密設(shè)備的校準(zhǔn)和測試。
AGILENT 5517C 激光頭因其高精度和穩(wěn)定性，廣泛應(yīng)用于需要極高測量精度的場合，是精密測量和控制系統(tǒng)中的核心組件。
英文資料：
AGILENT 5517C laser head is a high-precision laser interferometer system component commonly used in precision measurement and positioning systems. It is part of AGILENT's (now Keysight Technologies) 5517 series laser interferometer system, widely used in high demand measurement fields such as precision machinery, semiconductor manufacturing, and metrology.
Main features:
High precision measurement:
The 5517C laser head is based on the principle of laser interference and can provide high-precision position, distance, and velocity measurements at the sub nanometer level, making it very suitable for precision machining and manufacturing industries.
Strong stability:
This laser head has excellent beam stability, ensuring measurement accuracy and consistency even during long-term operation, making it suitable for industrial applications that require high stability.
High frequency output:
AGILENT 5517C provides high-frequency stable laser output, making it particularly outstanding in dynamic measurement and high-precision positioning.
Low temperature float design:
The laser head has low sensitivity to environmental temperature, and can maintain measurement accuracy even under temperature changes, improving the reliability of the system.
Integrated design:
Compact design, easy to integrate with other devices such as coordinate measuring machines (CMM), semiconductor etching equipment, and other high-precision instruments, saving space and simplifying system construction.
Application scenarios:
Semiconductor manufacturing: used for precise positioning and measurement in semiconductor equipment such as lithography machines.
Precision machine tools: used for real-time positioning and dimensional measurement of machine tools to ensure machining accuracy.
Metrology: Precision metrology systems applied in national and corporate laboratories.
Optical equipment calibration: used for calibration and testing of optical systems and other precision equipment.
The AGILENT 5517C laser head is widely used in applications that require extremely high measurement accuracy due to its high precision and stability, and is a core component in precision measurement and control systems.
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